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Description
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This dataset contains both experimental and simulation data for ions transmitted through a thin silicon crystal, along with the ion time-of-flight or energy. The crystal is 200 nm thick and has been amorphized on one side by Ga ion implantation and subsequent annealing. The sample was imaged using 50 keV He+ ions and 280 keV 22Ne+ ions. The sample was imaged with both the crystalline side as well as the amorphous side facing the ion beam. This has been designated as AC for where the amorpohous side is facing the ion beam and CA for where the crystalline side is facing the ion beam. This dataset is published alongside a paper in Applied Surface Science, where full details regarding the sample processing, as well as the experimental and simulation configuration can be found (https://doi.org/10.1016/j.apsusc.2025.163734).
The dataset is divided into 3 types:
Experimental Raw Data
Experimental_50keV_He_AC_200nm_Si
Experimental_50keV_He_CA_200nm_Si
Experimental_280keV_Ne22_AC_200nm_Si
Experimental_280keV_Ne22_CA_200nm_Si
Simulation Raw Data
Simulation_50keV_He_AC_200nm_Si
Simulation_50keV_He_CA_200nm_Si
Simulation_280keV_Ne22_AC_200nm_Si
Simulation_280keV_Ne22_CA_200nm_Si
Full-Trajectory Simulation Videos These are high-quality versions of the videos published with the online version of the paper The experimental data consists of ion counts recorded at the detector plane (i.e. X [mm], Y [mm], time-of-flight [ns]). The data is presented in the form of "events", where an "event" can have up to 4 counts. The total time since the start of the collection is also recorded in seconds. The simulation data consists of full ion trajectories through the sample (i.e. X [Å], Y [Å], Z [Å], DirX, DirY, DirZ, Energy [eV]). The simulation data has 10 columns. Columns 8 and 9 are not used for our work. The value of column 10 indicates the status of the particle trajectory: Start of trajectory Along the trajectory Stopped inside the target
Backscattered
Transmitted
A full description of the simulator and file format for the .tra files can be found in the IMSIL manual, which can be retrieved from: https://www.tuwien.at/en/etit/fke/research/process-simulation
The videos in this dataset are high-quality versions of the videos shown in the online version of the paper. Their labeling and descriptions can be found in Appendix C of the paper.
Uppsala Example Data: Event # Total Time (s) # of Counts X1 Y1 ToF1 X2 Y2 ToF2 X3 Y3 ToF3 X4 Y4 ToF4 1 0 1 -28.75 12.74 956.03 0 0 0 0 0 0 0 0 0 2 8.44599E-06 0 0 0 0 0 0 0 0 0 0 0 0 0 3 0.000592048 2 -20.59 -13.20 959.43 -18.06 -3.73 1404.04 0 0 0 0 0 0 4 0.000608955 0 0 0 0 0 0 0 0 0 0 0 0 0 5 0.000617407 1 9.93 -8.82 945.47 0 0 0 0 0 0 0 0 0 IMSIL Example Data: X Y Z DirX DirY DirZ Energy I1 IG Trajectory 1.621 -0.224 -1752.335 0.0000 0.0000 1.0000 280000.00 1 1 1 1.621 -0.224 -1748.794 0.0001 0.0000 1.0000 279992.02 1 1 2 1.621 -0.224 -1747.377 0.0001 -0.0001 1.0000 279983.32 1 1 2 1.622 -0.224 -1746.031 -0.0001 -0.0001 1.0000 279957.96 1 1 2 1.621 -0.225 -1744.701 0.0000 0.0001 1.0000 279927.18 1 1 2 (2025-07-24)
***This entry has been automatically imported via Datacite by LIST harvest scripts. Please refer to https://doi.org/10.5281/zenodo.15658827 for the original and latest version of the dataset and data downloads*** (2025-07-30)
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